
By Toshiaki Makabe,Zoran Lj. Petrovic
ISBN-10: 0750309768
ISBN-13: 9780750309769
Beginning with an summary of the elemental features and functions of low-temperature plasma, preeminent specialists Makabe and Petrovic discover the physics underlying the complicated habit of non-equilibrium (or low temperature) plasma. They talk about charged particle delivery typically and intimately in addition to macroscopic plasma features and straightforward strategies in fuel part and on surfaces. After laying this foundation, the publication examines state of the art computational equipment for modeling plasma and stories a variety of very important purposes together with inductively and capacitively coupled plasma, magnetically superior plasma, and diverse processing concepts, whereas various difficulties and labored examples make stronger the suggestions.
Uniquely combining physics, numerical tools, and sensible purposes, Plasma Electronics: purposes in Microelectronic gadget Fabrication equips you with the information essential to scale up lab bench breakthroughs into business innovations.
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Plasma Electronics: Applications in Microelectronic Device Fabrication (Series in Plasma Physics) by Toshiaki Makabe,Zoran Lj. Petrovic
by Steven
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