By Norman G. Einspruch,Simon S. Cohen,Gennady Sh. Gildenblat
ISBN-10: 0122341155
ISBN-13: 9780122341151
This quantity is constituted of 10 chapters. the 2 introductory chapters, bankruptcy 1 and a pair of function normal references for and metallurgical houses of skinny accomplishing motion pictures. next chapters assessment a few of the elements of VLSI metallization. The order of presentation has been selected to keep on with the typical processing series. In bankruptcy three, a few appropriate steel deposition concepts are mentioned. bankruptcy four provides the tools of VLSI lithography and etching. engaging in motion pictures are first deposited on the gate definition step; consequently, the problems relating to gate metallization are mentioned subsequent in bankruptcy 5.In bankruptcy 6, touch metallization is elaborated, and bankruptcy 7 is dedicated to multilevel metallization schemes. Long-time reliability is the topic of bankruptcy eight, which discusses the problems of touch and interconnect electromigration. GaAs metallization is tackled in bankruptcy nine. the quantity concludes with a normal dialogue of the capabilities of interconnect structures in VLSI.
Materials scientists, processing and layout engineers, and equipment physicists will locate the e-book very useful.
Read or Download VLSI Metallization: 15 (VLSI Electronics Microstructure Science) PDF
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VLSI Metallization: 15 (VLSI Electronics Microstructure Science) by Norman G. Einspruch,Simon S. Cohen,Gennady Sh. Gildenblat
by David
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